High resolution X-ray diffraction and topography of Bragg case interferometers

Abstract

In the first chapter a brief overview of the principles and techniques of high resolution X-ray diffraction and topography is presented. Since the best analysis of the measurement is given by simulating the experimental results with predictions based on Dynamical theory, a short description of the Dynamical theory and its results has been attempted in the chapter 2. This is followed by an extended literature review of the Bragg case interferometer (chapter 3).After that, the Double Crystal Diffraction and Topography experiments -chapter 4- have been described. Great effort had been made in fitting experimental and theoretically predicted curves. The major target of the experiment was to detect change of the diffracted reflectivity resulting from "separator" layer thickness changes in an interferometer structure sample of InGaAs/AlGaAs on GaAs. No detectable variation appeared in the thickness of the "separator" layer showing that the layer thickness varied by less than one atomic spacing across the wafer. Discussion of the results is presented parallel to the description of the experimental work.