Micro-fabricated devices for manipulating terahertz radiation

Abstract

This thesis reports on the design, fabrication and testing of microstructured devices for the manipulation of terahertz radiation. In particular, there is an emphasis on the fabrication and test of diffractive optics type components; including a surface micromachined, multilevel SU-8 based Fresnel lens and a micromilled aluminium Fresnel Zone Plate Reflector (FZPR). For both of these devices, the focal spot is characterized by measuring the electric field intensity and phase as a function of distance along the optical axis. This is carried out using a THz Vector Network Analyzer with associated free space optics. The results are compared directly with Finite Difference Time Domain simulations. A commercial FDTD solver, Lumerical, is used throughout the thesis. FDTD is first introduced for the design of antireflective subwavelength surfaces. These surface structures are bulk micromachined in silicon and their performance experimentally validated using THz Time-Domain Spectroscopy and Durham's THz VNA.
A compact THz VNA based S11 measurement configuration is presented which uses the FZPR and a single parabolic mirror. This reflection configuration is used for the characterization of liquid samples (e.g. water and Isopropyl Alcohol mixtures) in microfluidic channels. Two types of channels are presented; one is formed using bulk micromachined silicon whereas the other type uses acetate films to create low cost, disposable devices. The results from the compact measurement configuration are compared with those obtained using a more conventional four parabolic mirror transmission arrangement (as found in THz Time-Domain Spectroscopy systems). Even in the compact configuration, the alignment of the components is found to be a significant factor in determining the measurement performance. Consequently, a six-axis micropositioner (Hexapod), is used to automatically sweep the reflector with the aim of producing a self-aligning system.